Application of Power Electronic Switch in a Vacuum Installation

Abstract

This article proposes an original method of implementing a power electronic semiconductor switch using a technological process based on metal processing in a vacuum furnace. We give schematic diagrams of the power part and the control system, and oscillograms for their operation. Results from a practical application and experimental research on the operation of the vacuum installation are presented, and the variation in the glow discharge current with and without operation of the power electronic switch is explored. Photographs showing the details of the machining with and without the power electronic switch are included to demonstrate the effective operation of the proposed schematic solution.