FPGA-Based Control of Piezoelectric Actuators

Abstract

In many industrial applications like semiconductor production and optical inspection systems, the availability of positioning systems capable to follow trajectory paths in the range of several centimetres, featuring at the same time a nanometre-range precision, is demanding. Pure piezoelectric stages and standard positioning systems with motor and spindle are not able to meet such requirements, because of the small operation range and inadequacies like backlash and friction. One concept for overcoming these problems consists of a hybrid positioning system built through the integration of a DC-drive in series with a piezoelectric actuator. The wide range of potential applications enables a considerable market potential for such an actuator, but due to the high variety of possible positioned objects and dynamic requirements, the required control complexity may be significant. In this paper, a real-time capable state-space control concept for the piezoelectric actuators, embedded in such a hybrid micropositioning system, is presented. The implementation of the controller together with a real-time capable hysteresis compensation measure is performed using a low-budget FPGA-board, whereas the superimposed integrated controller is realized with a dSPACE RCP-system. The advantages of the designed control over a traditional proportional-integral control structure are proven through experimental results using a commercially available hybrid micropositioning system. Positioning results by different dynamic requirements featuring positioning velocities from 1 µm/s up to 5 cm/s are given.